photoresist developer

12/01/1997

Photoresist developer

AZ 915 MIF is a high-purity, high-performance, metal-ion-free photoresist developer that meets the requirements of sub-0.5-?m technology. Its specifications include: maximum of 2 ppb of sodium, iron, potassium, and calcium; 0.2610 ? 0.0005 normality; maximum of 200 particles >0.2 ?m/milliliter. The developer offers wide processing latitude, high contrast, and high throughput, and is formulated in the industry standard 2.38 weight percent TMAH. AZ Electronic Materials/Clariant Corp., Somerville, NJ; ph 908/429-3500, fax 803/556-3419.