Thin-film metrology tool

11/01/1997

Thin-film metrology tool

This table-top, thin-film metrology tool features a high-speed measurement head with no moving parts, a high-precision computerized stage, auto focus, and a Windows-based operating system. The NanoSpec 6100 uses noncontact spectroscopic reflectometry technology with an operating wavelength range from the UV through the visible, offering flexible measurement capability for localized film thickness determination and area mapping. Nanometrics Inc., Sunnyvale, CA; ph 408/746-1600, fax 408/720-0196, www.nanometrics.com/nanometrics,

e-mail [email protected].