temperature control systems

11/01/1997

Temperature control systems

The Tempryte series of high-reliability temperature control systems offers single- and dual-channel systems for DI water/glycol and perfluorinated fluids. Leak-free performance is achieved through the use of magnetically coupled gear pumps and custom-designed O-ring fittings, eliminating all thread, compression, and hose clamp fittings. Temperature ranges from -40 to +130?C are available, and the systems are designed for the needs of most commercial etch, CVD, RTP, CMP, and other processes. All of the systems are SEMI-S2-93 and CE certified. Bay Voltex Corp., Livermore, CA; ph 510/606-6293, fax 510/606-6297.