Vibration isolation platform

11/01/1997

Vibration isolation platform

The Series 9300 BaseMate platform offers good horizontal natural frequency for large equipment that requires isolation from its surroundings, such as SEMs, TEMs, CMMs, steppers, and mask aligners. The platform, available in four standard mount configurations, uses a two-stage pendulum and airmount isolation system that gives good omnidirectional control. Stage One is a low stiffness/high performace Active-Air Leveling system with very low vertical natural frequency, maximizing vertical isolation efficiency. Stage Two uses a tri-filar pendulum assembly that acts in conjunction with the airmount system to provide a stable cradle support with low horizontal natural frequency. Kinetic Systems Inc., Boston, MA; ph 617/522-8700, fax 617/522-6323.