SMIF robots

11/01/1997

SMIF robots

These new SMIF robots, ERGOSPEED 3000, are ergonomically designed to ease the loading and unloading of wafers. The key to the low-load system is an elevator mechanism that allows the transport of the wafer pod between an ergonomically positioned port plate and the operation level of the process tool. The operator places the pod on the plate, locks it into place, then raises the pod to the equipment loading height. When the pod door opens, the cassette is transferred between the pod and the equipment station. After processing, the door opens again and the cassette is returned into the pod, which is then returned to an ergonomic height and easily disengaged from the port. Reliability rate is 50,000 MCBF. Jenoptic Infab, Jena, Germany; ph 49/3641/65-4100, fax 49/3641/65-4111, e-mail [email protected].