On-site nitrogen generation

11/01/1997

On-site nitrogen generation

The Spectra-N 10000 generator is designed for fabs that require large quantities of ultrahigh-purity nitrogen. Its capacity exceeds 400,000 standard cubic feet/hour (scfh) of gaseous nitrogen (10,500 Nm3/hour) with single-digit ppb impurities available. A standard feature is a liquid oxygen column that can produce ultrahigh-purity oxygen at rates >3000 scfh (78 Nm3/hour). The Spectra-N 10000 eliminates inerts as well as the more commonly specified impurities, and its PreAir catalytic system removes carbon monoxide, carbon dioxide, hydrogen, and moisture from the feed air stream. BOC Gases, Murray Hill, NJ; ph 908/771-1512, fax 908/771-1460, www.boc.com.