Vacuum robot safety

11/01/1997

Vacuum robot safety

The Smart Dynamic Brake is a new feature of this company`s vacuum robot designed to prevent wafers from breaking in a vacuum process chamber in the event of a power failure or an Emergency Machine Off (EMO). Together with the SVR200/SVR300 absolute position capability, the brake allows for safe, automatic wafer-transfer system restart following a power failure in any process tool. The robot arm will decelerate at a safe speed along the same path it was traversing prior to the EMO or power failure. This controlled deceleration will not move the wafer on the end effector. Smart Machines, San Jose, CA; ph 408/324-1234 ext 104, fax 408/324-1699, www.smartmachines.com.