RTP report

11/01/1997

RTP report

This two-volume report provides information on the rapid thermal processing (RTP) field for marketing, strategic planning, and technology assessment. Volume 1 covers companies, products, and markets; Volume 2 covers technology and applications. Basic, epitaxial, and CVD RTP grew 45% in 1996. Equipment shipments are now past the $500M annual level, and are projected to reach $1.7B by 2001, more than half of which will be basic RTP (heating only, no deposition). Primarily a single-wafer technique, RTP fits the trend to cluster configuration and offers an alternative to furnace processing. Price: Vol.1, $950; Vol. 2, $475. Salzer Technology Enterprises Inc., Santa Monica, CA; ph 310/828-9628, fax 310/828-9386.