Process/metrology data collection service

11/01/1997

Process/metrology data collection service

This service defines data collection from process and metrology equipment for fab and assembly operations, bridging the vocabulary and technical gap between process/equipment engineers and CIM engineers. Process/equipment engineers know what data they need to collect, but may not fully understand how and when to get the data out of the equipment; CIM engineers know how to move and manage data on a factory network. What has been missing is a method for collecting data through the SECS/GEM interface. This service allows process engineers to input their requirements in a familiar form, and directs the CIM to act on and store data within the MES system and databases. Both manual and SECS/GEM-based data collection methods are covered. Multiple applications for the data, database destinations, and contextual data are defined with prime data. Secrest Research, Portola Valley, CA; ph 650/851-8142, [email protected].