Surface and interface symposium proceedings

11/01/1997

Surface and interface symposium proceedings

This 505-page book titled Control of Semiconductor Surfaces and Interfaces documents symposium proceedings from the 1996 Materials Research Society (MRS) Fall Meeting in Boston, MA. Semiconductor surfaces and interfaces play a vital role in modern-day electronic devices. This is especially true as device dimensions shrink. The properties of clean surfaces and chemically processed surfaces can also have an impact on the properties of layers grown subsequently. Surfaces and interfaces may exhibit modified structural, electronic, and optical properties, so it is important to understand their effects on subsequent growth, processing, and device fabrication. Topics in the volume include the structure of surfaces; the control of surface defects and properties through chemical etching and passivation; modification of surfaces for growth and processing; nucleation on semiconductor surfaces and self-assembly; the effects of surfaces and interfaces on subsequent growth; and the properties of semiconductor/dielectric and semiconductor/metal interfaces. In situ and ex situ monitoring of these properties using various electrical and optical techniques are also presented. ISBN: 1-55899-352-5. Price: Hardcover or microfiche, $54 (members), $62 (US), $71 (non-US). MRS, Pittsburgh, PA; ph 412/367-3012; fax 412/367-4373.