1997-1998 continuing education catalog

11/01/1997

1997-1998 continuing education catalog

This 88-page catalog contains a section on live, video, and in-company courses available in microelectronic manufacturing, microlithography, and photochemical coatings, interconnects, and MEMS. Courses cover subjects like the physics of metrology instruments; plasma processing; advanced silicon wafer cleaning; semiconductor materials and device characterization; chip reliability; advanced stepper modeling, characterization, control, and matching; resist thickness bake, exposure, and development control; lithography for high-aspect ratio microstructures; 193-nm lithography, fundamentals and issues; advanced topics in optical lithography; introduction to e-beam lithography; resists for deep-UV lithography; optoelectronic interconnects and packaging; multilevel interconnect technology; micro-optics and MEMS; and polysilicon surface micromachine technology. SPIE, Bellingham, WA; ph 360/676-3290, fax 360/647-1445, e-mail [email protected], www.spie.org.