CMP Tool

11/01/1997

300-mm SMIF series

These products for 300-mm isolation technology-based material handling, the SMIF-300 Series, are designed around the 300-mm front-opening standards, such as FOUP and 300-mm Interface. The SMIF-300FL load port complies with the latest SEMI and I300I industry guidelines and is compatible with all standard 300-mm unified wafer pods (25 and 13). The system maintains better than a Class 1 environment while transferring 300-mm wafers into a loadlock chamber, using an optional fan filter unit. Also, the 300FL allows optimized operator and wafer protection with its wafer protrusion sensor and human obstruction sensor. It offers direct, adjustable bolt-on interface per SEMI standards. The SMIF-300RL local tool buffer meets SEMI standards and I300I guidelines; it permits 300-mm wafer pods to be stored at the processing tool, decreasing load times and fab storage area needs. Scaleable architecture minimizes footprint requirements for each process tool. The SMIF-300WMS is a fully automated wafer management system that maintains better than a Class 1 environment during critical wafer-handling functions, including wafer lot splitting, sorting, merging, randomizing, and/or batch transfers from one cassette to another. Asyst Technologies Inc., Fremont, CA; ph 510/661-5000, fax 510/661-5166.