Semicon/Southwest Products
10/01/1997
Film thickness measurement
The Opti-Probe 5240 film thickness measurement tool features: direct measurement of the optical constants of films over a wide wavelength range (220–840 nm) using DUVSE; absolute ellipsometry with a 0.05 Å precision specification for measuring thin oxide and nitride layers (no reference required); fast DUV-NIR spectroscopy for precise measurement of t, n, k from 190–830 nm; combined angle and wavelength data for maximum resistance to errors due to process fluctuations; and a spot size of 0.9 µm. Therma-Wave Inc., Fremont, CA; ph 510/490-3663, fax 510/656-3852, e-mail [email protected].
Spatial pattern recognition software
Spatial Pattern Recognition (SPaR) software analyzes and identifies defect distribution characteristics on wafers. Engineers can import wafer map data generated by standard inspection tools, re-image them, and automatically sort defect patterns into unique, classified "signatures." These signatures can then be correlated to process events such as machine scratches or resist streaks, using a library of identified signatures. Knights Technology Inc., Sunnyvale, CA; ph 408/988-0600, fax 408/739-4438.
Optical CMP end point system
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OPTIMA 9400 is an interferometry-based CMP sensor system designed to let the process engineer monitor the dynamics of oxide and metal film removal in-situ or while polishing is occurring. Its modular design is wireless and easy to install, and its nonintrusive sensor monitors multiple points across wafers for improved edge-to-edge uniformity. In-situ monitoring eliminates the need for in-line, on-line, or off-line measurements, improving quality control, allowing flexible processing modifications, and increasing throughput. Luxtron Corp., Santa Clara, CA; ph 408/727-1600, fax 408/727-1677, www.luxtron.com, e-mail [email protected].
RTP tool for 300 mm
The SHS-3000 RTP tool, for 200- and 300-mm wafers, is designed for 0-25- to 0.15-µm processes, achieving temperature control to within ±2°C. It features top and bottom side lamp heating, for fast temperature ramp-up. The process chamber is composed of 251 individually controlled tungsten halogen lamps, including a hexagonal array of spot lamps above the wafer surface for precise temperature control. The SHS-3000 also features multizone, multipoint temperature measurement and emissivity independent temperature control. Steag AST electronik, Tempe, AZ; ph 602/777-0021, fax 602/777-0025.
Dry turbo pumping systems
The Minuteman dry turbo pumping systems produce fast, hydrocarbon-free high vacuum for applications including turbo system backing, UHV system roughing, cryopump roughing and regeneration, vacuum tube processing, and analytical instrumentation pumping. It employs robust diaphragm backing pumps matched to MacroTorr turbomolecular drag pumps, providing fast pumping of the gas loads that many processes generate. The series consists of 42 available configurations, with high-vacuum pumping speeds ranging from 40 –250 l/sec. Varian Vacuum Products, Lexington, MA; ph 800/882-7426, www.varian.com.
Vacuum traps
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VacuComp vapor sublimation traps remove contaminants from the vacuum process system before they reach the pump. (The trap is available to fit NW 50 systems.) The water-cooled trap catches by-products such as ammonium chloride, which are generated in such vacuum processes as CVD. A two-stage design traps effluent by-products in the first stage and particulates in the second. Trapping these contaminants reduces the likelihood that by-products will backstream into the reaction chamber and contaminate the system. HPS Div./MKS Instruments, Boulder, CO; ph 800/345-1967 or 303/449-9861, fax 303/442-6880, www.mksinst.com.
Process gas monitoring and control
ULTRAPURGE 2000 is an automated gas control unit that offers enhanced communication capabilities and expandibility in gas system control. It works with industry-standard equipment and communication protocols, including RS232, RS485, Ethernet, and LONworks. Also, the Materials Management System integrates existing gas systems and provides users with greater access to system operating data. Based on the Intellution FIX32 SCADA system and working across multiple platforms, it aids in the supervision, control, and data acquisition of all this company's gas delivery systems. Praxair Inc., Danbury, CT; ph 203/837-2032, www.praxair.com, e-mail [email protected].
Ionic contaminant control
The DX-800 analyzer combines ion chromatography and high-performance liquid chromatography to determine analytes such as inorganic anions, alkali and alkaline earth cations, organic acids, amines, and transition metals present in ultrapure water and electronic-grade process chemicals. Other capabilities of the system include multicomponent characterization of a process sample in a single analysis; monitoring of ionic analytes at detection limits not possible with other on-line or at-line methods; and monitoring of multiple process samples with near real-time results. Dionex Corp., Sunnyvale, CA; ph 408/481-4272, e-mail [email protected].
Automated leak detectors
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The Spectron 600 line of leak detectors are helium mass spectrometer devices that are fully automated and portable. One-button operation allows the leak detection tests to be performed in seconds, and the detectors have a startup time of <5 min. The 600D series features an oil-free diaphragm/molecular drag pump for applications that require 100% dry leak detection. The 600DS is available in a stainless steel enclosure with HEPA filters for the most stringent cleanroom standards. Edwards High Vacuum International, Wilmington, MA; ph 508/658-5410, fax 508/658-7969, www.edwards.boc.com.
Modular valve for CMP environments
The MACE modular valve system is constructed from HyQ PTFE, an advanced fluoropolymer made from 100% virgin PTFE Teflon, which is impervious to attack by CMP slurries. The design of the valve reduces wear and eliminates the problems of valve seat sanding. The reinforced poppit design prevents cracking or leaking, for fail-safe performance. Osmonics, Minnetonka, MN; ph 800/334-2770, fax 612/933-0141.
Storage and retrieval system
TurboStocker 300 serves as a fully scaleable automated storage and retrieval system for work-in-process (WIP) on the fab floor. Modular design enables the system to accommodate a wide range of high-density WIP buffer application needs for the requirements of 300-mm wafer fabrication. TurboStocker 300 sizes range from 10 to 20 feet in height, accommodating 13- or 25-wafer payloads (300-mm). Its performance reduces system cycle time, increasing throughput. PRI Automation Inc., Billerica, MA; ph 800/999-9774, fax 508/663-9755.
Degasification module
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The Separel degasification module removes dissolved oxygen from high-purity deionized water systems, reducing oxygen in DI water to <1 ppb in a single step and preventing potential defects in semiconductor devices caused by the formation of unwanted oxide layers. The compact, completely disposable filter assembly consists of polyolefin hollow fibers (manufactured by Dainippon Ink & Chemicals Inc.) that are contained within a heat-welded polysulfone/PVC shell. Pall Corp., Port Washington, NY; ph 516/484-3600 or 800/289-7255, fax 516/484-3637, www.pall.com, e-mail [email protected].
Shallow trench critical etch process
The 6510 HRe shallow trench isolation process module features 75–89° variable programmable profile control, ensuring the integrity of subsequent deposition processes. The process module is targeted at 0.18- and 0.25-µm shallow trench isolation applications, where top- and bottom-corner rounding is a critical requirement. Tegal Corp., Petaluma, CA; ph 707/763-5600, fax 707/765-9311, e-mail [email protected].
Wafer loader
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The NWL-860 single-cassette wafer loader handles 150- and 200-mm wafers and allows operators to perform both micro and macro inspection routines quickly and cleanly. It provides front-side macro inspection plus periphery and center backside-macro inspection. All macro inspection parameters, including wafer rotation, speed, and tilt angle, can be set for use in the manual or automatic mode and controlled via a joystick. The 860 provides high throughput by using a fast-moving multi-arm transfer module and has a built-in diagnostics system with LCD readout to facilitate maintenance procedures. To guard against wafer contamination, the system uses a noncontact pre-aligner; all wafer contact points are peak, and the main body is stainless steel, rated for Class 1 operation or better. Also, the flow-through architecture of the unit permits continuous downstream air flow in the cleanroom. An optional SMIF system is available that includes a SMIF cassette indexer and pod. The 860's ergonomic design includes a front-loading elevator platform for easy loading and unloading of cassettes; all controls are placed within easy reach of the operator. Optional DART for Windows NT defect review and inspection system software is available. Nikon Inc., Melville, NY; ph 516/547-4200.
Megasonics wet-process cleaning
Crystal Auto Tuning and Crystal Switching enable the MegaSonics Cleaner to deliver good cleaning performance and high reliability on wafers up to 300 mm. In this innovative technology for megasonics cleaning in sub-µm applications, multiple crystal transducers covering the entire bottom of the bath are excited individually at high-power densities. These crystals are fired in sequence, creating a forceful megasonic wave that yields very good sub-µm cleans. The wafer holder is held stationary in the cleaning tank, significantly reducing the amount of chemicals consumed, with a liquid tank size of half the typical footprint. ProSys Product Systems Inc., Campbell, CA; ph 408/871-2500, fax 408/871-2504, www.prosysinc.com.
Gas and liquid mixture classes
These 11 new specialty gas and liquid mixture classes allow performance characteristics to be matched precisely to application needs. Users can tighten process control to maximize yields and reduce costs, improve end-product quality and integrity, and eliminate the costs associated with unnecessary equipment downtime. The gas and liquid mixtures are generally delineated by the degree of accuracy and traceability provided. They include Dual-Analyzed, Dual-Certified, Single-Certified, Noncertified, and Custom standards. Leading-edge blending processes, such as Accublend, Flexblend, and GravStat, ensure mixture accuracy and dependability. Scott Specialty Gases, Plumsteadville, PA; ph 215/766-8861, fax 215/766-2476, www.scottgas.com.
Fab connectivity solution
Asyst-SWIFT (single-wire interface technology) is a Windows NT-based software toolset that integrates peripheral devices such as Asyst-SMIF devices, material tracking and control systems, barcode devices, and external sensors on semiconductor equipment. Compliant with Semi standards for SECS II, GEM, and HSMS, SWIFT allows a single-wire connection to a fab's computer integrated manufacturing network or manufacturing execution system. Its software components currently include ActiveTag, ActiveSMIF, and ActiveSC. Asyst Software Inc., Fremont, CA; ph 510/661-5000, fax 510/661-5166, www.asyst.com.