nterconnect cluster tool platform

09/01/1997

Interconnect cluster tool platform

The CONNEXION 800 cluster tool, capable of supporting six process modules and dual loadlocks (SMIF and AGV compatible), is an efficient solution for barrier/liner and copper interconnect applications. Its modular design provides high throughput and productivity. In addition to integration of this company`s PVD, CVD, and RTCVD modules, the 800 can integrate with other, third-party MESC-compatible modules. CVC, Rochester, NY; ph 716/458-2550 ext. 3136, fax 716/458-0424, www.cvc.com, e-mail [email protected].