Cluster tool wafer transport robot

09/01/1997

Cluster tool wafer transport robot

The MagnaTran 7 robot uses Time Optimal Trajectory to optimize transfer speeds of both 200- and 300-mm wafers for multiple cluster tool applications, increasing the throughput of PVD, CVD, etch, RTP, clean, and ash cluster tools. Using direct-drive technology and digital signal processing, the robot offers precise control of movements that are critically damped to provide optimal velocity. Manufacturers can specify robot arm, end-effector, and firmware components to customize the MagnaTran 7 for a variety of cluster tool transport needs. Configuration options include this company`s single Bi-Symetrik arm, dual (same-side) Leapfrog, or dual (opposing) end-effector arms. Mean-cycles between failure rate is 10 million cycles. Brooks Automation Inc., Chelmsford, MA; ph 508/262-2428, fax 508/262-2500, www.brooks.com.