Point-of-use scrubbing system

09/01/1997

Point-of-use scrubbing systems

The MYSTAIRE POU scrubber combines multiple scrubbing techniques in series for combined control of particulates (such as SiO2 and WO3) and gases that are present in combination in exhaust streams. Very long residence times yield high removal efficiencies. A nitrogen inlet prevents humidity from backstreaming to vacuum pumps and process chambers, eliminating plugging. Integral sump and mist eliminators are provided with each system. Options include complete instrumentation packages with PLC controllers, automatic pH adjust, liquid filtration, solenoid valves, flow sensors, pressure measurement, and outlet emissions monitors. Misonix Inc., Farmingdale, NY; ph 800/645-9846 or 516/694-9555, fax 516/694-9412, www.misonix.com, e-mail [email protected].