CVD system software

09/01/1997

CVD system software

ModelWare/RT enables CVD operators to detect process and equipment faults as wafers pass through the chamber. This data can then be archived and correlated to deviations in film thickness measurements. The system`s data collector continuously collects trace data from the Watkins Johnson 998 CVD system`s SECS port. Data such as the recipe number, injector flow status and rates, temperature, belt speed, and the operating state of the tool can be collected and analyzed. Triant Technologies Inc., Vancouver, Canada; ph 800/667-3038, fax 604/684-2099