Liquid waste management

09/01/1997

Liquid waste management

WasteMate-110 provides complete liquid waste removal from one or more process tools and meets or exceeds SEMI S2-93 and CE Mark standards. It comprises two independent cabinets that share a dual wall. Each cabinet is constructed from dual-wall steel and has an independent exhaust and sump with 110% spill containment. Overall cabinet dimensions are 86 ? 33 ? 80.5 in. (L, W, H). Microbar Inc., Sunnyvale, CA; ph 408/542-9025, fax 408/541-1441