Dissolved ozone analyzer

09/01/1997

Dissolved ozone analyzer

The Model dFFOZ sensor module provides continuous, in-line measurement of ozone over the concentration range 0-100 milligrams/liter in a full-flow recirculating stream. It is designed to be installed right at the wet bench cleaning bath, directly in-line in a recirculating stream, eliminating the waste and inconvenience of side-stream sampling. It provides straight-through measurement of dissolved ozone in deionized water at flow rates as high as 40 gallons/min. The sensor wetted materials are semiconductor grade and fully compatible with all wet chemistry processes. The dFFOZ uses UV absorption to make an absolute, high-accuracy measurement of ozone concentration that is ozone-specific and is not affected by background contaminants in the process stream. IN USA Inc., Needham, MA; ph 617/444-2929, fax 617/444-9229