Issue



Modular valve for CMP Modular valve for CMP


09/01/1997







Modular valve for CMP

The MACE modular valve system is constructed from HyQ PTFE, an advanced fluoropolymer made from 100% virgin PTFE Teflon, which is impervious to attack by CMP slurries. The design of the valve reduces wear and eliminates the problems of valve seat sanding. The reinforced poppit design prevents cracking or leaking, for fail-safe performance. Osmonics, Minnetonka, MN; ph 800/334-2770, fax 612/933-0141