Modular valve for CMP Modular valve for CMP
09/01/1997
Modular valve for CMP
The MACE modular valve system is constructed from HyQ PTFE, an advanced fluoropolymer made from 100% virgin PTFE Teflon, which is impervious to attack by CMP slurries. The design of the valve reduces wear and eliminates the problems of valve seat sanding. The reinforced poppit design prevents cracking or leaking, for fail-safe performance. Osmonics, Minnetonka, MN; ph 800/334-2770, fax 612/933-0141