Post-etch residue removers

09/01/1997

Post-etch residue removers

NP-968 is designed for post-metal etch polymer removal on metal lines containing titanium, effectively removing sidewall polymer without attacking the titanium adhesion layer. NP-970 is formulated for sidewall polymer removal with corrosion control for copper and aluminum metals, and is well suited to cleaning via layers down to copper metal in Damascene processes. Neither formulation contains any SARA Title 3 reportable components. Ashland Chemical Co., Dublin, OH; ph 610/559-6500, fax 610/559-6309, www.ashchem.com