Fall 1977 SEMI publications catalog

09/01/1997

Fall 1977 Semi publications catalog

This 48-page catalog describes a selection of semiconductor industry publications, technical papers, and educational materials on topics like 300 mm; chemical mechanical polishing; cleanrooms; cleaning; CVD; etch; microelectromechanical systems; microlithography; packaging; perfluorocompounds; software; standards; statistics; flat panel display; gases; chemicals; Asia; Japan; manufacturing; fabs; management; and materials. Other information in the catalog includes a description of SEMI and a list of SEMI offices worldwide. SEMI, Mountain View, CA; ph 415/940-6904, www.semi.org.