Wafer defect review system

09/01/1997

Wafer defect review system

This system is designed for the inspection of 150-, 200-, and 300-mm wafers. The software interface allows the operator to move easily to a prescibed wafer location or die. The system drives the stage precisely to the defect for review and reclassification, and can also store an image of the defect for later analysis. A graphical interface wafer map shows the operator the exact XYZ position of the stage and all the defects in the area. Simple arrow buttons permit precise movement from die to die. The system`s motorized stage fits almost any microscope, and linear scales directly measure stage travel and provide movement accuracy of ? 3 ?m. The wafer chuck allows easy wafer setup and alignment; optional autofocus is available. Prior Scientific Inc., Rockland, MA; ph 800/877-2234, fax 617/878-8736.