Scanning probe microscope system

09/01/1997

Scanning probe microscope system

The Accurex II SPM system uses TrueMetrix, which provides closed-loop scan linearization to ensure accurate images. This design uses an inherently linear sensor to measure scanner motion, integrated into a real-time feedback loop. This results in highly accurate measurements in both lateral and vertical axes. (Accuracy is ensured at all scan ranges.) Also, when a feature of interest is located on the sample surface, it can be selected for detailed analysis. The zoomed image will be of the desired region, without the need for the several iterations that are often required to find it. NearContact atomic force microscopy imaging gives state-of-the-art high-resolution, nondestructive sample measurement. In this mode, imaging is performed with low-amplitude cantilever oscillation, which protects soft or fragile surfaces from damage by the AFM probe. The probe is also protected from damage and wear when imaging hard surfaces. Accurex II is easily configured and can be upgraded to use a wide range of sample types: contact, NearContact, and noncontact AFM; lateral force microscopy; electrical force microscopy; magnetic force microscopy; scanning electric potential microscopy; scanning thermal microscopy; and lithography. TopoMetrix Corp., Santa Clara, CA; ph 408/982-9700, fax 408/982-9751.