Simultaneous Purge/isolation valve

08/01/1997

Simultaneous purge/isolation valve

EZ Valve 1400 is designed to allow continuous, uninterrupted closed-loop flow of fluid/gas from a source, while isolating and purging fluid/gas from the lines and components on the load side. The valve is installed between the source and load lines. The pneumatic control box is then used to switch between normal, bypass, and purge modes. This design reduces or eliminates downtime associated with the disconnection of the cooling/heating lines typically found in most etch, sputter, and CVD equipment. Flow Tech Engineering Inc., Fremont, CA; ph 510/440-9469, e-mail [email protected].