Thermal Mass Flow Controller

08/01/1997

Thermal mass flow controller

The Sierra 800 series capillary tube-type thermal mass flow meter and controller, suitable for use with all clean gases, measures and controls in flow ranges from 10 sccm to 2000 slpm. The straight sensor is designed to resist clogging and contamination. Instrument advantages include accuracy from 1 to 1.5% of full scale; fast response of 1 sec to within 2% of final flow with no overshoot or undershoot; and repeatability of -0.15%. Sierra Instruments Inc., Monterey, CA; ph 800/866-0200, fax 408/373-4402.