In-line carrier lifetime Measurement

08/01/1997

Plug-and-pump turbopump

The Turbo-V141 Navigator is a fully integrated, turbomolecular vacuum pumping system that combines the pump, electronics, and cooling fan into a single unit. The result is a compact tool that is easily integrated into vacuum systems. Only one connection point is required, further easing integration and reducing installation costs. An enhanced version of the MacroTorr pump provides Navigator with high throughput capacity and high inlet pressure (>10-3 mbar); a high compression ratio for light gases; and a high tolerable exhaust pressure (13 mbar). Varian Vacuum Products, Lexington, MA; ph 800/882-7426, www.varian.com.