CO2 Blasting

08/01/1997

In-line carrier lifetime measurement

The JANUS 300 is a fully automatic carrier lifetime measuring system for processing 300-mm wafers, using the ?-PCD technique. Designed for Class 1 cleanroom environments with robotic cassette-to-cassette handling, the system is best suited to metal contamination control in thermal or plasma processes. JANUS features the use of the low injection level technique for lifetime measurements, giving accurate, high-resolution mapping of iron and other metal contaminants in a short space of time. Amecon GmbH, Berlin, Germany; ph 49/3329-6820-13, fax 49/30-9866-588, e-mail [email protected].