BGA Die Bonder

08/01/1997

Extended range of silicon wafers

These Cz-silicon wafers include prime polished, double-side polished, and epitaxial wafers with orientations of 1-0-0 and 1-1-1. Also, an optional polyback and/or LTO seal can be provided. Substrate dopants include boron, phosphorous, antimony, and arsenic (resistivity 0.001 to 100 Ohmcm). The epi layers are produced with single-wafer reactors with As, P, and B as dopants. Okmetic Ltd., Espoo, Finland; ph 358/9502-800, fax 358/9502-80300.