Instrumented wafers

08/01/1997

RTP system

Starfire is a 200-mm-wafer rapid thermal processing (RTP) system designed for 0.18-?m production applications. System features include: open architecture to allow future process integration; throughput approaching 80 wafers/hour; atmospheric wafer transfer; a Brooks Automation wafer-handling platform and robotics; MESC-compatible interface; uniform
epeatable processing, independent of wafer backside emissivity; purged wafer I/O loadlocks; and NO, N2O process capability. AG Associates, San Jose, CA; ph 408/935-2000, fax 408/935-2700.