Argon Ion Lasers

08/01/1997

Small-footprint furnace

The PEO-603 is a small-batch production furnace that is suitable for all thermal processes up to 1100?C, including LPCVD. The ultraclean, hermetically sealed quartz tube (9 in. dia, 16 in. depth) accepts up to 50 eight-in. wafers and allows vacuum down to 10-6 torr, as well as programmable injection of up to six process gases, controlled by flowmeters or mass flow controllers. The furnace has fast response, due to its very low thermal mass and IR heating, with ramp up/down better than 100?C/min. ATV Technology Inc., Billerica, MA; ph 508/663-2362, fax 508/663-0517.