Pattern Generation tool

08/01/1997

Step-and-repeat scanning stepper

The NSR-S202A step-and-repeat scanning stepper is designed for the mass-production of 256-Mbit DRAMs. Based on a KrF excimer laser (248 nm) exposure light source, it provides a resolution of 0.25 ?m or better, uses a wide exposure area of 25 ? 33 mm, and incorporates an air-bearing stage for increased throughput and reduced lens distortion values. Nikon Precision Inc., Belmont, CA; ph 415/882-9494.