Global Positioning robot

08/01/1997

Pattern generation tool

The MEBES 4500S 0.25-?m pattern generation tool creates four levels of gray by making four passes over the substrate with a writing address that is four times the size of the data address. This allows placement of edges at the original design address. In addition to higher throughput for small addresses, the Multipass Gray writing strategy improves print quality by reducing errors through multipass averaging, and delivers a higher (8 ?C/cm2) dose to support high-contrast processes. A robotic loading module and two-cassette load chamber offer flexible, continuous reticle queuing and fast pumpdown time. Etec Systems Inc., Hayward, CA; ph 847/291-1616 ext 232, fax 847/291-1758