Spin Coater

08/01/1997

Global positioning robot

This global positioning robot (GPR) system enables the transport robot to interact compliantly with misaligned cassettes and process modules, as well as deliver deflection compensation, even during transport. The system is a six degrees of freedom, servo-controlled robot that dynamically eliminates the alignment variance between the transported material and the workstations. The yaw-axis feature of the GPR enables the robot to replace track systems in the in-line equipment layout, reducing the cost of equipment automation and increasing throughput. Genmark, Sunnyvale, CA; ph 408/745-6520, fax 408/745-0583.