High-Purity ammonia

08/01/1997

Spin coater

Model P6712 is a programmable desktop spin coating system for the application of photoresists, polyimides, metallo-organics, dopants, silica films, and most organic and aqueous solutions. The system executes one of three fully automated, user-determined coating sequences under the supervision of a programmable logic controller. Each recipe consists of multiple ramp up, hold, and ramp down steps in the range 500-8000 rpm. Acceleration and deceleration rates are computer-calculated, based on the desired profile. The unit can handle a variety of substrate sizes and shapes up to 10-in. diameter. Optional features include multiple coating material dispensing valves, interchangeable vacuum chucks, and worldwide voltage values. Specialty Coating Systems Inc., Indianapolis, IN; ph 800/356-8260 ext. 268 or 317/244-1200 ext.268, fax 317/240-2092