Issue



Literature


08/01/1997







O-ring sealing catalog

This eight-page catalog features O-ring seals for the semiconductor industry made of high-performance, elastomer materials. It provides a description of the chemical environments used in the fabrication of ICs that demand chemically resistant o-ring seals: epitaxial silicon, coater developer, crystal growth, LPCVD/

oxidation, and lithography. It also describes the types of products, including TEFLON-encapsulated, EPDM,

VITON, silicone, fluorosilicone, and aegis perfluoroelastomers. Separate sections for wet and dry process chemistries highlight performance standards for the selection of high-quality seals. International Seal Inc., Santa Ana, CA; ph 714/834-0602, fax 714/834-0590.

Ultrahigh-purity gases and chemicals capability brochure

This brochure titled "Global Capabilities for the Electronics Industry" (Publication number 325-9611) lists ultrahigh-purity gases and chemicals, equipment, systems, and services available to chip-packaging businesses and other emerging technologies around the world. These capabilities include a range of specialty and bulk gases, on-site MEGASYS gas and chemical management, GASGUARD gas cabinets, nitrogren purifiers, on-site gas-to-chemical generation systems, and a line of standard and customized analytical monitoring systems and services. Air Products and Chemicals Inc., Allentown, PA; ph 800/654-4567, fax 800/880-5204, www.airproducts.com.

Metal tube flowmeter brochure

This brochure describes the MT 3809 through-flow meter, an instrument that features 2% full-scale accuracy and high repeatability, and is capable of handling high temperatures, high pressures, and a broad range of flow capacities. In addition, the MT 3809 is less sensitive to high-viscosity fluids, operates with minimal pressure drop, requires no back pressure, and provides increased damping for gas appli-

cations to eliminate float bounce. The meter is available with a microprocessor-based transmitter, optional alarm and pulse output for totalization, and one or two switch-inductive alarms with or without the transmitter. Brooks Instrument, Hatfield, PA; ph 215/362-3700, fax 215/362-3745.

Cold cathode starter brochure

This brochure highlights the IgniTorr, a device that emits photons at the exact energy required to release electrons from a cathode, providing the means to start and maintain ionization in a cold cathode starter. A cold cathode ionization sensor measures vacuum by the number of positive ions collected in a plasma. The sensor has electrodes with a large electric potential difference and strong magnetic fields. Electrons are created that are accelerated toward the anode, but the magnetic field deflects them, making them travel a longer path before eventually colliding with the anode. Atoms and molecules in the gas are ionized, and positive ions are captured by the ion collector to indicate pressure. The IgniTorr is a double-sided, 2 3/4-in. CF flange with a welded UV transparent glass lamp cover. The lamp cover is positioned on the IgniTorr so that released photons have line-of-sight access to the internal surfaces of the cathode. MKS Instruments, HPS Division, Boulder, CO; ph 800/345-1967 or 303/449-9861.

Plastic bearing design guide

This full-color, 12-page brochure titled "Plastic Bearing Design Guide" features a line of PTFE and thermoplastic bearings from a manufacturer of specialty sealing elements and engineered plastics. The guide includes detailed information on sleeve, flange, and thrust bearings, as well as selection guidelines. Also included is hardware design criteria and media compatibility data for plastic bearing materials. Greene, Tweed & Co.,

Kulpsville, PA; ph 215/256-9521, fax 215/256-0189.

Wet processing system brochure

This full-color brochure describes the FPD Full-Flow Wet Processing system designed for the advanced processing of flat panel displays. The system`s Direct Displace chamber design and process approach perform critical cleans and etches with no contamination or watermark formation. Unlike wet benches and in-line sprays, the Direct Displace process keeps the flat panel glass stationary and moves the chemistries through the processing chamber. This approach integrates

all processes, including etch, clean, strip, and dry, in a single chamber, saving costs and floor space, while boosting reliability and throughput. The process results also provide uniformity across the entire flat panel surface. CFM Technologies Inc., West Chester, PA; ph 610/696-8300, fax 610/696-8309.

Low flow gas mass measurement guide

This 12-page booklet titled "Application Guide to Low Flow Gas Mass Measurement and Control" describes a line of mass flow meters and controllers used in various industries, including the Model 840 mass flow controller in semiconductor manufacturing. These mass flow controllers with 1%-of-full-scale accuracy are now being used in moisture analyzer systems. They feature electronic setpoint control, fast response, and the ability to accurately measure and control mass flow rate without temperature and pressure compensation. Sierra Instruments Inc., Monterey, CA; ph 800/866-0200 or 408/373-0200, fax 408/373-4402.

Minicapabilities water treatment brochure

This trifold, four-color bulletin titled "Purely US Filter" contains a concise overview of a manufacturer`s capabilities in process water treatment, wastewater treatment, outsourced water management and resource recovery, and worldwide service. The brochure describes how the company`s water and wastewater treatment technologies can meet customers` needs in a variety of markets, including the microelectronics industry. US Filter Corp., Palm Desert, CA; ph 760/341-8170, fax 760/341-9368.

Vibration isolation catalog

This catalog provides an overview of information on vibration control equipment, and details a line of vibration isolation workstations, tabletop platforms, equipment platforms, vibration-free islands, and individual mounts. Other sections of the catalog include features and benefits of the tools, performance data, complete specs, outline drawings of the products, and product selection pointers. Kinetic Systems Inc., Boston, MA; 617/522-8700, fax 617/522-6323.

Toxic gas monitor brochure

This six-page, color brochure describes a centralized, multipoint approach to toxic gas monitoring. The toxic gas monitor (TGM) uses molecular emission spectrometry for ppb detection sensitivity. It features reliability for the prevention of interference and false alarms - accomplished by the Getter Validation technique, which retests with gettering. Also highlighted in the brochure are the differences between high-maintenance, conven-

tional approaches and the maintenance- and consumable-free TGM; specs, including configurations, detection sensitivity, stability, scan rate, data logging and retrieval, service interval, automatic self-tests, and interfaces; and method of operation. TeloSense Corp., Fremont, CA; ph 510/490-2087, fax 510/490-6485, e-mail [email protected], www.telosense.com.

Gearhead engineering and selection guide

This guide provides information on sizing a line of high-precision, right-angle, gearheads for specific applications. The DuraTRUE 90 Planetary Gearheads offer a maximum backlash of 8 arc-min, and are available in 60-, 90-, 115-, and 142-mm2 frame sizes. They have a peak toque rating of 7377 in.-lb, ratios from 1:1 to 500:1, and a peak radial load of 2500 lb. Additional features include steel gears hard-

ened to HRC 60 min.; lifetime lubrication; light-weight anodized aluminum housing; stainless steel output shaft with heavy duty, deep-grooved ball bearings; needle bearings on planet gears; and a RediMount self-aligning mounting system. Thomson Micron LLC, Ronkonkoma, NY; ph 516/467-8000, fax 516/467-9814, e-mail [email protected].

ID pipe machining equipment catalog

This full-color catalog features a line of 200 and 900 series tools that mount on the inside dia. of pipe with self-centering mandrels, providing precision pipe and machining for weld preparation. These heavy-duty machines can be used with automatic orbital welding systems, and are widely used for portable machining in several industries, including semiconductor fabrication. The catalog also covers special application solutions available through accessories and custom

equipment configurations. A quick reference chart provides an overview of the equipment size range offered, and details configuration options such as optional cutting heads and choice of drive sources available. Special accessories like flange-facing modules described. Tri Tool Inc., Rancho Cordova, CA,; ph 800/345-5015 or 916/351-0144, fax 916/351-0372.

High-purity piping brochure

This full-color, 12-page brochure describes high-purity piping processes, materials, and equipment used in the manufacture of the SYGEF high-purity PVDF product line. The brochure includes an overview of the company`s infrared and bead and crevice free welding technologies, and proprietary injection molding and pipe extrusion equipment. Statistical process control tools monitored by in-

house and third-party verification that complement industry-standard SEMATECH methodology are also outlined. Other areas covered include a PVDF raw materials list; cleanroom facilities and equipment; the ultrapure water plant; surface quality; the leach-out testing program; quality control and inspection; traceability; packaging; shipping; customized fabrication; and installation. George Fischer Inc., Tustin, CA; ph 800/280/5544, fax 818/365-5742.

Flip chip systems video

A 12-min., voice-over video describes the operation of the semiautomatic Model 410 flip chip bonder and manual Model 850 flip chip placement systems designed for process development and low-volume production applications involving polymer adhesive and solder reflow. Close-up views show pickup, alignment, placement, and removal of flip chip die onto and from various substrates. The systems` features such as cube beam splitter viewing system; programmable computer macros; video camera, zoom lens, and super VGA monitor; heated workstage; adjustable closed loop bond load control; hot gas and Xenon lamp spot-heating systems; and dual adjustable illuminators for die and substrate are covered in detail. Placement accuracies are ?5 }mum for the Model 410 and ?12 ?m for the Model 850. Semiconductor Equipment Corp., Moorpark, CA; ph 805/529-2293, fax 805/529-2193.

Internet environmental, health, and safety report

A report on environmental, health, and worker safety programs in the chip industry is available on the internet home page of the Semiconductor Industry Association, URL http://www.semichips.org. Titled "Worker Safety, Health, and Environmental Protection: Top Priorities for the US Semiconductor Industry," the report provides detailed accounts of the industry`s successful efforts to maintain a safe workplace and a clean environment in the highly complex world of semiconductor manufacturing. The profile also includes descriptions of individual programs underway, and describes industry efforts to increase conservation and recycling programs, eliminate use of potentially harmful chemicals, reduce ozone-depleting emissions, and cut hazardous wastes. Semiconductor Industry Association, San Jose, CA; ph 408/436-6600, fax 408/436-6646.