Automatic defect classification system

08/01/1997

Automatic defect classification system

This off-line automatic defect classification system, the ADC NT, runs on the INS 3000 review station and can also be retrofitted to the MIS 200 and INS 2000 review tools. The integrated ADC system permits fast setup and optimization, with emphasis on a rapid transition from operator to machine classification. A knowledge base generator allows users to characterize and teach defects to the system with ease. To improve performance on difficult metal layers, the ADC system uses a combination of laser-autofocus with a high-speed, video-based image averaging focus. Leica Inc., Deerfield, IL; ph 800/909-3935, fax 201/236-5917.