PRI patent for 300-mm wafer handling used in intra tool buffer

07/01/1997

PRI patent for 300-mm wafer handling used in intra tool buffer

The US patent office has awarded PRI Automation, Billerica, MA, a patent for its 300-mm wafer transfer system with rotational capabilities. The patented technology, known as PRI`s Virtual Cassette, is said to allow every process tool in the fab to be linked to intrabay automation systems while aiding the adoption of pod and tool interface standards. The Virtual Cassette is also a feature of the company`s 300-mm wafer lot buffering system, known as the Intra Tool Buffer (ITB) announced last fall.

"Connecting every tool to a fab-wide automation system requires a standard I/O port, and certain process tools, such as vacuum and wet bench, need a mechanism for re-orienting the wafers to meet that standard," said Mord Wiesler, PRI`s CEO, founder, and co-inventor of the Virtual Cassette.

This is PRI`s first patent for its 300-mm equipment; other PRI 300-mm-related patents are also pending. John Chrisos, PRI`s VP of marketing, said the patent-protected Virtual Cassette technology is already in use in PRI`s ITB at wet process equipment supplier STEAG MicroTech, GmbH.

In developing the Virtual Cassette technology, PRI collaborated with I300I, SEMI, and several process tool vendors. The company has also said it will consider licensing the Virtual Cassette technology patent, though its has not yet received any inquiries about licensing agreements, according to Chrisos. - Christine Lunday, WaferNews.