Advanced Metallization and interconnect system book

07/01/1997

Advanced metallization and interconnect systems book

Just published as the 13th of the Advanced Metallization for ULSI Applications series is the volume titled Advanced Metallization and Interconnect Systems for ULSI Applications in 1996. In this volume, based on conferences held in October 1996 in Boston, MA, and Tokyo, Japan, is the keynote address on scaling high-performance interconnects. Additional topics include advanced aluminum metallization; advanced copper metallization; silicides/barrier metals; low-/high-k dielectrics; and chemical mechanical polishing. ISBN: 1-55899-385-1. Price: $58 (MRS member), $65 (US), $72 (non-US). Materials Research Society (MRS), Pittsburgh, PA; ph 412/367-3003, fax 412/367-4373.