marangoni dryer

07/01/1997

MARANGONI dryer

The MARANGONI Dryer processes wafers of up to 300 mm; it has particle-, organic-, and metallic ion-free performance, with low COO, for both hydrophilic and hydrophobic wafers. Using the Marangoni effect, the dryer operates without any mechanical stress and with very low IPA consumption. The system is compatible with carrier and carrierless designs, and is available in stand-alone and modular versions. Steag Microtech Inc., Austin, TX; ph 406/755-8367, fax 406/755-8368.