Fast Ramp Furnace Enhancement

07/01/1997

Fast ramp furnace enhancement

The A400i is a fast ramp enhancement of the Advance 400 clustered modular vertical furnace. It reduces process and cycle time and increases throughput by more than 50%, and it has a fast temperature control that permits mix-and-match wafer processing with regular furnaces and retrofit fast ramping on an installed base. It also supports the dual-boat operation and nitrogen-purged ambient control features of the A400. ASM Europe, Bilthoven, The Netherlands; ph 31/30-229-8411, fax 31/30-229-3823.