Thin film growth

07/01/1997

Thin-film growth

The EFM T3 UHV triple cell evaporator is designed for high-purity thin-film growth. Mounted on a single 2.75-in. OD Conflat style flange, each cell has an independent filament and flux monitor, eliminating the risk of cross-talk. The flux monitor feature allows very precise dosing, since the flux can be adjusted before opening the integral shutter, designed for simultaneous or sequential cell evaporation. Each cell can be operated in excess of 3000?C, with wire or crucible-held evaporant material. The EFM T3 is water-cooled to minimize pressure rise during evaporation. Omicron Assoc., Pittsburgh, PA; ph 412/831-2262, fax 412/831-9828.