Wet Chemistry composition analyzer

07/01/1997

Wet chemistry composition analyzers

These four chemical analyzers provide real-time, in-situ monitoring of SC-1, SC-2, SPM, and HF concentrations in semiconductor processes. Benefits include prevention of wafer scrap by reduction of incorrect mixing of chemicals, improved cleaning efficiencies due to better particle performance over the bath life, and reduced chemical usage. The frequency of bath change-outs is reduced, resulting in higher equipment availability and fewer witness wafers. Tres-Ark Inc., San Diego, CA; ph 541/998-4648, fax 541/998-5373