Thin Film measurement

07/01/1997

Thin film measurement

The SE 850 spectroscopic ellipsometer is a broad-range UV/VIS/NIR instrument in the spectral range from 250-1700 nm. The system is based on high-resolution multiplex detection in the UV/VIS. The NIR spectral range is made possible by applying FT-IR spectroscopy, which adds speed, high resolution, and a high signal-to-noise ratio, as well as providing automatic wavelength calibration. Very high measurement speed allows whole spectra to be measured within 30 sec, with a high spectral resolution (1000 measurement points in the range 250-850 nm). Sentech Instruments GmbH, Berlin, Germany; ph 49/30-6392-5520, fax 49/30-6392-5522, e-mail compuServe 101551,1371.