CD-SEM

07/01/1997

CD-SEM

The MI-3080N is a fully automatic, high-precision CD-SEM for nondestructive measurement of 0.18-?m devices. Retarding Field Column technology allows 3-nm resolution or better at 800 V with >3-nm (3s) repeatability. A laser interferometer feedback stage travels to exactly the same area each time, with stage positioning of ?1 ?m without operator intervention. At throughput of 40 wafers/hour, the MI-3080N provides six distinct measuring algorithms that can be programmed into recipes in order to eliminate operator intervention for a variety of semiconductor applications. Topcon Technologies Inc., Paramus, NJ; ph 201/261-5410, fax 201/262-8188.