CDM tool

07/01/1997

CDM tool

This critical dimension measurement (CDM) tool provides force-sensor measurement accuracy and repeatability, combined with high productivity, through cylindrical, durable tips and scanning algorithms that speed measurement time. The balance beam force sensor and the instrument`s tip are independent. This allows greater probe tip material compatibility, including the use of highly durable, chemically etched, optical-fiber tips that provide a wide range of tip shapes and sizes, and tips that allow sidewall measurement to within a degree of vertical. Surface/Interface Inc., Sunnyvale, CA; ph 408/732-7111, e-mail [email protected].