Liquid Source delivery system

07/01/1997

Liquid source delivery system

This new system provides accurate and repeatable flow control of source vapor into a process chamber. The system consists of: a liquid mass flow controller; an evaporator to vaporize the liquid before introduction into the process chamber; an additional mass flow controller for the carrier gas that is to be mixed with the source vapor; a heat exchanger to heat the carrier gas; air shutoff valves to integrate the components; and an electronic module to control system operation. Aera, Austin, TX; ph 508/922-7566, fax 508/922-8397.