Slurry Blending and distribution

07/01/1997

Slurry blending and distribution

The P6000 slurry blending and distribution system can combine up to four liquid slurry concentrates with ultrapure water to create dilute slurry solutions. The solutions are transferred to an intermediate day tank where they are continuously stirred to ensure chemical mixing and particle suspension; they are then dispensed under pressure to process points of use. Units feature mix and dispense redundancy, N2 humidification, and an optional on-line metrology package. The PLC-controlled units interface with various fab-wide monitoring systems. FSI International Inc., Chaska, MN; ph 612/448-1451, fax 612/361-