Inert gas purifier

07/01/1997

Inert gas purifier

The GateKeeper 100K inert gas purifier protects gas panel components from molecular and particulate contamination. Water and oxygen can cause corrosion in a gas system and can disrupt processes such as CVD, epitaxy, and sputtering. Model 100K can handle flow rates up to 20 slm at lower pressures and higher flow rates at higher pressures, and removes contaminants such as H2O, O, CO, CO2, and H2 from inert gases, and H2O, O, CO, and CO2 from H2 to <1 ppb. Aeronex Inc., San Diego, CA; ph 800/511-9761 or 619/452-0124, fax 619/452-0229.