Pressure Transducer
07/01/1997
Pressure transducer
Type 631 Absolute Heated Baratron pressure transducer prevents contamination buildup and particle generation in processes such as LPCVD nitride. It combines 150?C operation and on-board electronics, and offers ?0.25% of reading accuracy (including nonlinearity, hysteresis, and nonrepeatability). The elimination of both sensor-to-electronics cables and remote mounting of the electronics package improves measurement repeatability. MKS Instruments, Andover, MA; ph 508/975-2350 ext. 5541, fax 508/975-0093